Characterization of plasma-enhanced CVD processes - symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A
- Författare
- Symposium on characterization of plasma enhanced CVD processes 1989) (Boston : Dennis W. Hess Dale E. Ibbotson G. Lucovsky
- (Editors: Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess., " ... papers presented at the symposium on Characterization of Plasma Enhanced CVD Processes held in Boston, Massachusetts on November 27-28, 1989.")
- Genre
- Ej skönlitteratur, Konferenser, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Materials Research Society | cop. 1990 | USA, Pittsburgh, Pa | ix, 250 sidor. ill. |